The background of the study is that the planar film heterostructures are nowadays the most common objects nanophotonic and nanoelectronic technologies. The authors noted that, among such objects found so-called quantum wells, which are formed by a complex series of nanoscale layers are deposited with differing elemental composition, and simple single-layer coatings. Test heterostructure may be polycrystalline or amorphous sequentially deposited layers, but can be provided epitaxial objects. In addition to the interest in the composition, structure and thickness of the layers of heterostructure itself, it is important and knowing the width and the quality of the interlayer boundaries, as well as the presence-absence of their mutual diffuse infiltration. The results of the article is that of the operating experience of experts are usually quite clearly represent technological equipment, what type of heterostructures and the distribution of elemental composition therein can be expected. However, the intended routing is always in need of an objective independent confirmation. For planar nanoheterostructures most effective method of non-destructive testing of the objective distribution of elements over the depth of the target and the presence-absence is epitaxially ion beam diagnostics.