Quality of early childhood education institutions specifically, dimensions of process quality should be evaluated. Purpose of this study is to analyze process quality of early childhood education by using many-facet Rasch measurement model (MFRM). In this study, data were collected from twelve early childhood education institutions by four independent judges. Early Childhood Environment Rating Scale (ECER) was used to evaluate the process quality of the institutions. MFRM was applied to analyze the data. The results indicated that early childhood education institutions were below the desirable level of process quality. It has been found that judges exhibited similar behaviors and when item statistics were examined they served the purpose of the evaluation. Standardized measurement tools and measurement models were recommended to increase process quality of early childhood education.