Based on the evaluation of 24 faculty development programs in the United States and other scholarly activities, the benefits of systematic planning and evaluation of faculty development programs are considered. In addition, a set of field tested instruments for planning and evaluation and case studies of institutional programs are presented, and the faculty development movement and the literature on faculty are reviewed. Principles that may be helpful in effective planning of professional growth programs are as follows: decision-making requires reliable information; planning programs for people demands flexibility; good planning entails broad participation; evaluation and feedback are essential elements of the planning process; planning should be comprehensive; and planning must be coordinated, organized, and sustained. A planning and evaluation model is diagrammed that encompasses problem identification and solution, tasks, outcomes, and areas of focus. Attention is directed to the reliability and validity of the six instruments that were employed to assess faculty, administrators, and program goals and practices. Two other instruments, a demographic sheet and goal inventory, were also used, and all the instruments are appended. Information is also presented concerning how faculty evaluated the professional development programs on their campuses and what the evaluation team felt were model programs uncovered in the study. The following model programs are described: The University of Rhode Island, Syracuse University, Gordon College, Earlham College, St. Mary's Junior College, and Illinois State University. (SW)