ERIC Number: EJ332081
Record Type: Journal
Publication Date: 1986
Reference Count: N/A
Analytical Chemistry and the Microchip.
Lowry, Robert K.
Analytical Chemistry, v58 n1 p23A-26A,28A,30A,32A,34A Jan 1986
Analytical techniques used at various points in making microchips are described. They include: Fourier transform infrared spectrometry (silicon purity); optical emission spectroscopy (quantitative thin-film composition); X-ray photoelectron spectroscopy (chemical changes in thin films); wet chemistry, instrumental analysis (process chemicals); auger electron spectroscopy (residue identification); and mass spectroscopy (moisture determination). (JN)
Publication Type: Journal Articles; Reports - General
Education Level: N/A
Authoring Institution: N/A