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ERIC Number: EJ936362
Record Type: Journal
Publication Date: 2011-Aug
Pages: 14
Abstractor: As Provided
ISSN: ISSN-0018-9359
An Undergraduate Nanotechnology Engineering Laboratory Course on Atomic Force Microscopy
Russo, D.; Fagan, R. D.; Hesjedal, T.
IEEE Transactions on Education, v54 n3 p428-441 Aug 2011
The University of Waterloo, Waterloo, ON, Canada, is home to North America's first undergraduate program in nanotechnology. As part of the Nanotechnology Engineering degree program, a scanning probe microscopy (SPM)-based laboratory has been developed for students in their fourth year. The one-term laboratory course "Nanoprobing and Lithography" is accompanied by a preceding one-term lecture course, "Nanoprobing and Lithography." The lecture course lays the theoretical foundation for the concepts covered in the laboratory course. The students work in groups of two and obtain hands-on experience in biweekly 3-h laboratory sessions. The labs use a dedicated undergraduate SPM teaching facility consisting of five atomic force microscope stations. The laboratory course covers all common standard modes of operation, as well as force spectroscopy, electrostatic force microscopy, magnetic force microscopy, and scanning probe lithography by electrochemical oxidation and scratching/ploughing of resist. In light of the breadth of the nanotechnology engineering educational program in terms of synthesis and characterization of nanomaterials, the authors designed a dedicated SPM lab with a capacity of up to 130 students per term. (Contains 3 footnotes and 11 figures.)
Institute of Electrical and Electronics Engineers, Inc. 445 Hoes Lane, Piscataway, NJ 08854. Tel: 732-981-0060; Web site:
Publication Type: Journal Articles; Reports - Descriptive
Education Level: Higher Education
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A
Identifiers - Location: Canada