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Abbas, K.; Leseman, Z. C. – IEEE Transactions on Education, 2012
A laboratory course on the theory, fabrication, and characterization of microelectromechanical systems (MEMS) devices for a multidisciplinary audience of graduate students at the University of New Mexico, Albuquerque, has been developed. Hands-on experience in the cleanroom has attracted graduate students from across the university's engineering…
Descriptors: Graduate Students, Manufacturing, Data Analysis, Laboratory Experiments