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ERIC Number: EJ829029
Record Type: Journal
Publication Date: 2007-Mar
Pages: 10
Abstractor: As Provided
ISSN: ISSN-0143-0807
Thin-Film Nanocapacitor and Its Characterization
Hunter, David N.; Pickering, Shawn L.; Jia, Dongdong
European Journal of Physics, v28 n2 p161-170 Mar 2007
An undergraduate thin-film nanotechnology laboratory was designed. Nanocapacitors were fabricated on silicon substrates by sputter deposition. A mask was designed to form the shape of the capacitor and its electrodes. Thin metal layers of Au with a 80 nm thickness were deposited and used as two infinitely large parallel plates for a capacitor. TiO[subscript 2] with a 400 nm thickness and a high dielectric constant ([epsilon][subscript r] [tilde] 100) was coated between the gold metal layers by using sol-gel and dip-coating techniques. A RC circuit was built to measure the capacitance of the nanocapacitors. Some fundamental thin-film characterization equipment such as a four-point probe, a step profiler and an atomic force microscope were used in this laboratory to characterize the devices' morphology and electrical properties. (Contains 8 figures.)
Institute of Physics Publishing. The Public Ledger Building Suite 929, 150 South Independence Mall West, Philadelphia, PA 19106. Tel: 215-627-0880; Fax: 215-627-0879; e-mail:; Web site:
Publication Type: Journal Articles; Reports - Evaluative
Education Level: Higher Education
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A