The paper presents the results of a study of existing models and mathematical representations of a range of truly peristaltic multiphase micro-pumps with a piezoelectric actuator (piezo drive). Piezo drives with different types of substrates use vertical movements at deformation of individual piezoelectric elements, which define device performance. The dependences of the maximum micro-pump output pressure from the difference between the phases of voltage drives are established. The dynamic properties of piezo drive, deformation forms of its individual piezoelectric elements were defined by theoretical and experimental methods. The dependence of micro-pump output pressure from the phase frequency and difference was determined.