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ERIC Number: EJ995700
Record Type: Journal
Publication Date: 2012-Nov
Pages: 8
Abstractor: As Provided
Reference Count: 29
ISBN: N/A
ISSN: ISSN-0018-9359
A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts
Jalali, M.; Marti, J. J.; Kirchhoff, A. L.; Lawrenz, F.; Campbell, S. A.
IEEE Transactions on Education, v55 n4 p517-524 Nov 2012
A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools. (Contains 5 figures and 3 tables.)
Institute of Electrical and Electronics Engineers, Inc. 445 Hoes Lane, Piscataway, NJ 08854. Tel: 732-981-0060; Web site: http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=13
Publication Type: Journal Articles; Reports - Descriptive
Education Level: Higher Education; Secondary Education
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A
Identifiers: N/A