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50 Years of ERIC
50 Years of ERIC
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ERIC Number: EJ749812
Record Type: Journal
Publication Date: 2005-Sep
Pages: 4
Abstractor: Author
Reference Count: 0
ISBN: N/A
ISSN: ISSN-0021-9584
Hands-On Classroom Photolithography Laboratory Module to Explore Nanotechnology
Stelick, Scott J.; Alger, William H.; Laufer, Jesse S.; Waldron, Anna M.; Batt, Carl A.
Journal of Chemical Education, v82 n9 p1361-1364 Sep 2005
Nanotechnology is an area of significant interest and can be used as a motivator for students in subject areas including physics, chemistry, and life sciences. A 5X reducer system and associated lesson plan was used to provide students a hands-on exposure to the basic principles of photolithography and microscale circuit fabrication.
Division of Chemical Education of the American Chemical Society. Subscription Department, P.O. Box 1267, Bellmawr, NJ 08099-1267. Tel: 800-691-9846; Tel: 856-931-5825; Fax: 856-931-4115; e-mail: jchemed@egpp.com; Web site: http://jchemed.chem.wisc.edu/
Publication Type: Journal Articles; Reports - Descriptive
Education Level: N/A
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A
Identifiers: N/A