After presentation of a peripheral cue, a subsequent saccade to the cued location is delayed (inhibition of return: IOR). Furthermore, saccades typically deviate away from the cued location. The present study examined the relationship between these inhibitory effects. IOR and saccade trajectory deviations were found after central (endogenous) and peripheral (exogenous) cuing of attention, and both effects were larger with an onset cue than with a color singleton cue. However, a dissociation in time course was found between IOR and saccade trajectory deviations. Saccade trajectory deviations occurred at short delays between the cue and the saccade, but IOR was found at longer delays. A model is proposed in which IOR is caused by inhibition applied to a preoculomotor attentional map, whereas saccade trajectory deviations are caused by inhibition applied to the saccade map, in which the final stage of oculomotor programming takes place.