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ERIC Number: EJ288716
Record Type: Journal
Publication Date: 1983
Pages: N/A
Abstractor: N/A
ISBN: N/A
ISSN: N/A
EISSN: N/A
A Course on Plasma Processing in Integrated Circuit Fabrication.
Sawin, Herbert H.; Reif, Rafael
Chemical Engineering Education, v17 n4 p148-51 Fall 1983
Describes a course, taught jointly by electrical/chemical engineering departments at the Massachusetts Institute of Technology, designed to teach the fundamental science of plasma processing as well as to give an overview of the present state of industrial processes. Provides rationale for course development, texts used, class composition, and course syllabus by lectures. (JM)
Publication Type: Journal Articles; Reports - Descriptive
Education Level: N/A
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A
Grant or Contract Numbers: N/A