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ERIC Number: EJ1033279
Record Type: Journal
Publication Date: 2014-Jul
Pages: 6
Abstractor: As Provided
ISBN: N/A
ISSN: ISSN-0021-9584
EISSN: N/A
Cost-Effective Systems for Atomic Layer Deposition
Lubitz, Michael; Medina, Phillip A., IV; Antic, Aleks; Rosin, Joseph T.; Fahlman, Bradley D.
Journal of Chemical Education, v91 n7 p1022-1027 Jul 2014
Herein, we describe the design and testing of two different home-built atomic layer deposition (ALD) systems for the growth of thin films with sub-monolayer control over film thickness. The first reactor is a horizontally aligned hot-walled reactor with a vacuum purging system. The second reactor is a vertically aligned cold-walled reactor with a quartz crystal microbalance (QCM) and a vacuum purging system. This latter reactor was also built to be capable of the addition of liquid- or solution-phase precursors, including the addition of a solution-based precursor containing nanoparticles. Each system cost less than $10,000, and they were used to deposit aluminum oxide thin films using trimethylaluminum and water/isopropyl alcohol as coreactants. Whereas the horizontal hot-walled system was able to deposit alumina thin films at a growth rate of 1.2-1.4 Å/cycle, the more sophisticated vertically aligned reactor deposited films at 0.95-1.1 Å/cycle, which is comparable to commercial systems costing $100,000 or more. Most importantly, both systems were fabricated entirely by M.S. and undergraduate students at Central Michigan University.
Division of Chemical Education, Inc and ACS Publications Division of the American Chemical Society. 1155 Sixteenth Street NW, Washington, DC 20036. Tel: 800-227-5558; Tel: 202-872-4600; e-mail: eic@jce.acs.org; Web site: http://pubs.acs.org/jchemeduc
Publication Type: Journal Articles; Reports - Descriptive
Education Level: Higher Education; Postsecondary Education
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A
Identifiers - Location: Michigan
Grant or Contract Numbers: N/A