Peer reviewed
Direct linkERIC Number: EJ749812
Record Type: Journal
Publication Date: 2005-Sep
Pages: 4
Abstractor: Author
ISBN: N/A
ISSN: ISSN-0021-9584
EISSN: N/A
Hands-On Classroom Photolithography Laboratory Module to Explore Nanotechnology
Stelick, Scott J.; Alger, William H.; Laufer, Jesse S.; Waldron, Anna M.; Batt, Carl A.
Journal of Chemical Education, v82 n9 p1361-1364 Sep 2005
Nanotechnology is an area of significant interest and can be used as a motivator for students in subject areas including physics, chemistry, and life sciences. A 5X reducer system and associated lesson plan was used to provide students a hands-on exposure to the basic principles of photolithography and microscale circuit fabrication.
Descriptors: Biological Sciences, Curriculum Development, Physical Sciences, Hands on Science, Scientific Principles, Optics, Molecular Structure, Molecular Biology, Printing, Science Education, Technology, Biotechnology, Photography
Division of Chemical Education of the American Chemical Society. Subscription Department, P.O. Box 1267, Bellmawr, NJ 08099-1267. Tel: 800-691-9846; Tel: 856-931-5825; Fax: 856-931-4115; e-mail: jchemed@egpp.com; Web site: http://jchemed.chem.wisc.edu/
Publication Type: Journal Articles; Reports - Descriptive
Education Level: N/A
Audience: N/A
Language: English
Sponsor: N/A
Authoring Institution: N/A
Grant or Contract Numbers: N/A
